TY  - BOOK
AU  - Madou, Marc J
TI  - Fundamentals of microfabrication and nanotechnology. Vol.2: Manufacturing Techniques for Microfabrication and Nanotechnology
T2  - Manufacturing Techniques for Microfabrication and Nanotecy
SN  - 9781420055191
U1  - 620.5 
PY  - 2012///
PB  - Taylor and Francis Group
ER  -