Belyi, V.I. [et al] <br/><br/>
Silicon nitride in electronics   
by V.I.Belyi, [et al] 
 - Amsterdam  Elsevier  1988 
 - viii, 263p. 
 - Materials science monographs  34 .
<br/><br/><label>ISBN: </label>0444426892 
<br/><br/><label>Dewey Class. No.: </label>621.3817  / N882