Wolf, Stanley <br/><br/>
Silicon Processing for the VLSI Era-Vol.2  Process Integration 
by Stanley Wolf 
 - California  Lattice Press  1990 
 - xxxi, 753p. 
<br/><br/><label>ISBN: </label>096167245 
<br/><br/><label>Dewey Class. No.: </label>621.395  / N9013.2 (CeNSE)