Madou Marc, J <br/><br/>
Fundamentals of Microfabrication  The Science of Miniaturization 
by Marc J Madou 
 - 2nd 
 - Boca Rato  CRC Press  2002 
 - 723p. 
<br/><br/><label>ISBN: </label>9780849308260 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / P02;1 (CeNSE)