Wolf, Stanley <br/><br/>
Silicon Processing for the VLSI Era Vol.1  Process Technology 
by Stanley Wolf and Richard N Tauber 
 - California  Lattice Press  2000 
 - xxxvi, 890p. 
<br/><br/><label>ISBN: </label>9780961672164 
<br/><br/><label>Dewey Class. No.: </label>621.395  / P001.1 (CeNSE)