TY  - BOOK
AU  - Bakir, S Muhannad, ed
AU  - Meindl, D James, ed
TI  - Integrated interconnect technologies for 3D nanoelectronics systems
T2  - Integrated Microsystems Series
SN  - 9781596932463
U1  - 621.381 
PY  - 2009///
CY  - Norwood
PB  - Artech house
ER  -