Adams, Thomas M <br/><br/>
Introductory MEMS  Fabrications and applications 
by Thomas M Adams and Richard A Layton 
 - New York  Springer  2010 
 - xv, 444p. 
<br/><br/><label>ISBN: </label>9780387095103 
<br/><br/><label>Dewey Class. No.: </label>621.381  / P103