TY  - BOOK
AU  - Makabe, T
AU  - Petrovic, Z
TI  - Plasma Electronics: Applications in Microelectronic Device Fabrication
T2  - Series in Plasma Physics
SN  - 9780750309769
U1  - 621.044 
PY  - 2006///
CY  - New York
PB  - Taylor & Francis
ER  -