Makabe, T <br/><br/>
Plasma Electronics  Applications in Microelectronic Device Fabrication 
by T Makabe and Z Petrovic 
 - New York  Taylor & Francis  2006 
 - 339p 
 - Series in Plasma Physics .
<br/><br/><label>ISBN: </label>9780750309769 
<br/><br/><label>Dewey Class. No.: </label>621.044  / P04