TY  - BOOK
AU  - International conference on Frontiers of Characterization and Metrology for Nanoelectronics (2007
AU  - Seiler, David G., ed. et al.,
TI  - Frontiers of Characterization and Metrology for Nanoelectronics
T2  - AIP Conference Proceedings. Vol.931
SN  - 9780735404410
U1  - 621.3815 
PY  - 2007///
CY  - Melville
PB  - American Institute of Physics
N1  - CD-ROM INCLUDED
ER  -