TY  - BOOK
AU  - Liu, Ai-Qun
TI  - Photonic MEMS devices: Design, fabrication and control
T2  - Optical Science and Engineering
SN  - 1420045687
U1  - 621.381 
PY  - 2008///
CY  - Boca Raton
PB  - CRC
ER  -