Liu, Ai-Qun <br/><br/>
Photonic MEMS devices  Design, fabrication and control 
by Ai-Qun Liu 
 - Boca Raton  CRC  2008 
 - 483p 
 - Optical Science and Engineering .
<br/><br/><label>ISBN: </label>1420045687 
<br/><br/><label>Dewey Class. No.: </label>621.381  / P083