Plasma etching  an introduction 
ed. by Dennis M. Manos and Daniel L. Flamm. 
 - Boston  Academic press  1989 
 - xii, 476p. 
 - Plasma-Materials interactions .
<br/><br/><label>ISBN: </label>0124693709 
<br/><br/><label>Dewey Class. No.: </label>530.44  / N89