IEEE Workshop on micro electro mechanical systems. (3  1990  California) <br/><br/>
Investigation of microstructures, sensors, actuators, machines and robots-proceedings.   

 - New York  IEEE  1990 
 - xiii, 226p  incl. bibl. 
<br/><br/><label>Dewey Class. No.: </label>621.381  / N902 "SER"