TY  - BOOK
AU  - Benecke, W.
AU  - IEEE Workshop on Microelectro - Mechanical Systems (5: 1992: Travemunde)
AU  - Petzold, H.C.
TI  - Investigation of micro structures, sensors, actuators, machines & robots: Proceedings /ed. by W. Benecke, H.C. Petzold
SN  - 0780304985
U1  - 621.381 
PY  - 1992///
CY  - New Jersey
PB  - IEEE
KW  - Microelectronics; MEMS 1992; IEEE Robotics and automation society
ER  -