TY  - BOOK
AU  - IEEE Workshop on Micro Electro Mechanical Systems (7: 1994: Oiso)
TI  - Microelectro mechanical systems. MEMS 1994: Proceedings
SN  - 078031834X
U1  - 621.381 
PY  - 1994///
CY  - New Jersey
PB  - IEEE
KW  - Microelectronics; IEEE Robotics and Automation Society
ER  -