TY  - BOOK
AU  - IEEE Workshop on Micro Electro Mechanical Systems (6: 1993: Florida)
TI  - Investigation of micro structures, sensors, actuators, machines and systems: Proceedings
SN  - 0780309588
U1  - 621.381 
PY  - 1993///
CY  - New Jersey
PB  - IEEE
KW  - Microelectronics; MEMS 1993; IEEE Robotics and automation society
ER  -