Investigation of micro structures, sensors, actuators, machines and systems  Proceedings 

 - New Jersey  IEEE  1993 
 - xvii, 294p  incl. bibl. 
<br/><br/><label>ISBN: </label>0780309588 
<br/><br/><label>Subjects--Index Terms: </label>Microelectronics; MEMS 1993; IEEE Robotics and automation society; 
<br/><br/><label>Dewey Class. No.: </label>621.381  / N932 "SER"