TY  - BOOK
AU  - Subrahmanyam, Gorthi V.R.M.S.
TI  - Characterization of electrostatic MEMS actuators beyond pull-in
T2  - IISc, Dept of SERC, MSc, Engg Thesis
U1  - 621.381 
PY  - 2006///
CY  - Bangalore
PB  - IISc
ER  -