Subrahmanyam, Gorthi V.R.M.S. Characterization of electrostatic MEMS actuators beyond pull-in by Gorthi V R M S Subrahmanyam - Bangalore IISc 2006 - ix, 64p - IISc, Dept of SERC, MSc, Engg Thesis . Dewey Class. No.: 621.381 / P063 "THESIS"