TY  - BOOK
AU  - Patil, Nishad
TI  - Design and analysis of MEMS angular rate sensors
T2  - IISc, Dept. of ME, MSc.(Engg) Thesis
U1  - 621.381 
PY  - 2006///
CY  - Bangalore
PB  - IISc
N1  - Include CD-ROM
ER  -