Ukita, H <br/><br/>
Micromechanical photonics   
by H Ukita 
 - Berlin  Springer  2006 
 - xi, 250p, with 285 figures 
 - Microtechnology and Mems .
<br/><br/><label>ISBN: </label>3540313338 
<br/><br/><label>Dewey Class. No.: </label>621.381  / P063