Topical conference on deposition and growth  Limits for microelectronics ( Anaheim  1987 ) <br/><br/>
Deposition and growth  limits for microelectronic 
ed. by G. W. Rubloff. 
 - New York  American Institute of Physics  1988 
 - vii, 388p. 
 - American Institute of Physics. Conference Proceedings  No.167 .
<br/><br/><label>ISBN: </label>0883183676 
<br/><br/><label>Dewey Class. No.: </label>537.622  / N883