TY - BOOK AU - Topical Conference on Surface Conditioning of Vaccum Systems (1989, Los Angeles ) TI - Surface conditioning of vaccum systems ed. by Robert A. Langley [et. al] T2 - American Vacuum Society Series SN - 0883187566 U1 - 621.55 PY - 1990/// CY - New York PB - American Institute of Physics ER -