TY  - BOOK
AU  - Topical conference on radio frequency power in plasmas (16
AU  - Wukitch, Stephen J., ed.
AU  - Bonoli, Paul T., ed.
TI  - Radio frequency power in plasmas
T2  - AIP Conference proceedings. Vol.787
SN  - 0735402760
U1  - 530.14 
PY  - 2005///
CY  - Melville
PB  - American institute of physics
ER  -