TY  - BOOK
AU  - Pattnaik, Prasant Kumar
TI  - Analysis and design of micro-opto-electro-mechanical systems (MOEMS) based pressure and vibration sensors
T2  - IISc, Dept. of ECE PhD. Thesis
U1  - 621.3827 
PY  - 2005///
CY  - Bangalore
PB  - IISc
ER  -