Pattnaik, Prasant Kumar Analysis and design of micro-opto-electro-mechanical systems (MOEMS) based pressure and vibration sensors by Prasant Kumar Pattnaik - Bangalore IISc 2005 - xviii, 172p. - IISc, Dept. of ECE PhD. Thesis . Dewey Class. No.: 621.3827 / P05 "THESIS"