IEEE/SEMI Advanced manufacturing conference and workshop (2005  Munich) <br/><br/>
Advancing semiconductor manufacturing excellence. ASMC 2005. Proceedings   

 - Piscataway  IEEE  2005 
 - viii, 282p.  incl. bibl. 
<br/><br/><label>ISBN: </label>0780389964 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / P05 "SER"