TY  - BOOK
AU  - Wasa, Kiyotake
AU  - Kitabatake, Makota
AU  - Adachi, Hideaki
TI  - Thin film materials technology: Sputtering of Compound Materials
SN  - 5540211187
U1  - 621.38152 
PY  - 2004///
CY  - New York
PB  - William Andrew Pub
ER  -