Wasa, Kiyotake <br/><br/>
Thin film materials technology  Sputtering of Compound Materials 
By Kiyotaka Wasa, Makoto Kitabataka and Hideaki Adachi 
 - New York  William Andrew Pub  2004 
 - xiv, 518p 
<br/><br/><label>ISBN: </label>5540211187 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / P046