Lobontiu, Nicolae <br/><br/>
Mechanics of micro-electromechanical systems   
by Nicolae Lobontiu and Ephrahim Garcia 
 - USA  Kluwer  2005 
 - xi, 405p. 
<br/><br/><label>ISBN: </label>1402080131 
<br/><br/><label>Dewey Class. No.: </label>621.812  / P05