TY  - BOOK
AU  - SPIE
AU  - Tanner, Danelle M., ed
AU  - Ramesham, Rajeshuni., ed
TI  - Reliability, testing and characterization of MEMS/MOEMS III: Proceedings
T2  - SPIE Proceedings series V. 5343
U1  - 621.381 
PY  - 2004///
CY  - California
PB  - SPIE
ER  -