IEEE International conference on microelectronic test structures (17  2004  Japan) <br/><br/>
Microelectronic test structures. ICMTS 2004. Proceedings   

 - Piscataway  IEEE  2004 
 - xii, 313p.  incl. bibl. 
<br/><br/><label>ISBN: </label>0780382625 
<br/><br/><label>Dewey Class. No.: </label>621.381548  / P04 "SER"