IEEE/SEMI Advanced semiconductor manufacturing conference and workshop (15  2004  Boston) <br/><br/>
Advancing the science and technology of semiconductor manufacturing excellence. ASMC 2004. Proceedings   

 - Piscataway  IEEE  2004 
 - xi, 507p.  incl. bibl. 
<br/><br/><label>ISBN: </label>0780383125 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / P04 "SER"