TY  - BOOK
AU  - Cherns, David.
AU  - NATO Advanced Research Workshop on the Evaluation of Semiconductor Materials by Electron Microscopy
TI  - Evaluation of advanced simeconductor materials by electron microscopy /ed. by David Cherns
SN  - 030643363X
U1  - 621.381532 
PY  - 1989///
CY  - New York
PB  - Plenum
KW  - Semiconductors Electron microscopy
ER  -