TY  - BOOK
AU  - Conference on Optical Metrology
AU  - Al-jumaily Ghanim A., ed
TI  - Optical Metrology
T2  - Critical Reviews of optical science and technology. v.CR73
SN  - 0819432350
U1  - 681.4 
PY  - 1999///
CY  - Bellingham
PB  - SPIE Optical Engineering press
ER  -