TY  - BOOK
AU  - International conference on characterization and metrology for ULSI technology (2003
AU  - Seiler, David G., ed. et al.,
TI  - Characterization and metrology for ULSI technology. AIP Conference proceedings. Vol.683 (CD-ROM incl)
T2  - AIP Conference proceedings. Vol.683
SN  - 0735401527
U1  - 621.38152 
PY  - 2003///
CY  - Melville
PB  - American institute of physics
ER  -