International conference on characterization and metrology for ULSI technology (2003  Austin) <br/><br/>
Characterization and metrology for ULSI technology. AIP Conference proceedings. Vol.683 (CD-ROM incl)   
ed by David G Seiler, et al. eds, 
 - Melville  American institute of physics  2003 
 - xviii, 818p.  incl. bibl. 
 - AIP Conference proceedings. Vol.683 .
<br/><br/><label>ISBN: </label>0735401527 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / P033