Ananthasuresh,G. K. <br/><br/>
Optimal synthesis methods for MEMS   
by G K Ananthasuresh 
 - Boston  Kluwer Academic  2003 
 - xiii,320p. 
 - The Kluwer international series in microsystems .
<br/><br/><label>ISBN: </label>1402076207 
<br/><br/><label>Dewey Class. No.: </label>621.812  / P032