Workshop on Vacuum Mechatronics(1 Santa Barbara, 1989) Vacuum mechatronics ed. by Steven E. Belinski [et al] - New York American Institute of Physics 1989 - x, 167p. - American Institute of Physics, Conference Proceedings No.192 . American Vacuum Society Series: 7 ISBN: 0883183943 Dewey Class. No.: 533.5 / N89