Workshop on Vacuum Mechatronics(1  Santa Barbara, 1989) <br/><br/>
Vacuum mechatronics   
ed. by Steven E. Belinski [et al] 
 - New York  American Institute of Physics  1989 
 - x, 167p. 
 - American Institute of Physics, Conference Proceedings  No.192 .
<br/><br/> American Vacuum Society Series: 7 
<br/><br/><label>ISBN: </label>0883183943 
<br/><br/><label>Dewey Class. No.: </label>533.5  / N89