Shalini, K.

Development and application of metalorganic complexes as precursors for the chemical vapour deposition of oxide thin films by K. Shalini - Bangalore : Indian Institute of Science, 2002. - viii, 200 p. : ill.

Includes bibliography.

PhD;2002;Materials Research Centre.


Chemical vapor deposition
Metal alkolides
Thermodynamics

530.4275 / P02