TY  - BOOK
AU  - Uttam, Mane Anil
TI  - Atomic layer deposition(ALD) and metalorganic chemical vapour deposition(MOCVD) of metals and metal oxides
T2  - IISc. Dept. of MRC, PhD. thesis
U1  - 620.1699 
PY  - 2003///
CY  - Bangalore
PB  - IISc
ER  -