IEEE/SEMI Conference and workshop on Advanced semiconductor manufacturing (14  2003  Munich) <br/><br/>
Advancing the science of semiconductor manufacturing excellence. ASMC 2003. Proceedings   

 - Piscataway  IEEE  2003 
 - iv, 330p.  incl. bibl. 
<br/><br/><label>ISBN: </label>0780376730 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / P03 "SER"