TY  - BOOK
AU  - IEEE International conference on microelectronic test stuctures (2003
TI  - Microelectronic test structures. ICMTS 2003. Proceedings
SN  - 0780376536
U1  - 621.381548 
PY  - 2003///
CY  - Piscataway
PB  - IEEE
ER  -