IEEE International conference on microelectronic test stuctures (2003  Monterey) <br/><br/>
Microelectronic test structures. ICMTS 2003. Proceedings   

 - Piscataway  IEEE  2003 
 - 249p.  incl. bibl. 
<br/><br/><label>ISBN: </label>0780376536 
<br/><br/><label>Dewey Class. No.: </label>621.381548  / P03 "SER"