TY  - BOOK
AU  - Pelesko, John A.
AU  - Bernstein, David H.
TI  - Modeling MEMS and NEMS
SN  - 1584883065
U1  - 621.812 
PY  - 2003///
CY  - Boca Raton
PB  - Chapman and Hall/CRC
ER  -