IEEE International conference on microelectronic test structures (2002  Cork) <br/><br/>
Microelectronic test structures. ICMTS 2002. Proceedings   

 - Piscataway  IEEE  2002 
 - x, 254p.  incl. bibl. 
<br/><br/><label>ISBN: </label>0780374649 
<br/><br/><label>Dewey Class. No.: </label>621.381548  / P021 "SER"