Johnstone, Robert W <br/><br/>
Introduction to surface micromachining   
by Robert W Johnstone and M Parameswaram 
 - Boston  Kluwer  2004 
 - 186p 
<br/><br/><label>ISBN: </label>1402080204 
<br/><br/><label>Dewey Class. No.: </label>671.35  / P04