TY  - BOOK
AU  - IEEE International symposium on semiconductor manufacturing (5: 1993: San Francisco)
TI  - Semiconductor manufacturing. Proceedings
SN  - 0780312139
U1  - 621.38152 
PY  - 1993///
CY  - New Jersey
PB  - IEEE
KW  - Semiconductors - Manufacturing; IEEE Components, packaging and manufacturing Society
ER  -