Semiconductor manufacturing. Proceedings   

 - New Jersey  IEEE  1993 
 - 152p  incl. bibl. 
<br/><br/><label>ISBN: </label>0780312139 
<br/><br/><label>Subjects--Index Terms: </label>Semiconductors - Manufacturing; IEEE Components, packaging and manufacturing Society; 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / N933 "SER"